Hierarchical attention module-based hotspot detection in wafer fabrication using convolutional neural network model

Published in IEEE Access, 2024

Recommended citation: Mobeen Shahroz, Mudasir Ali, Alishba Tahir, Henry Fabian Gongora, Carlos Uc Rios, Md Abdus Samad, and Imran Ashraf, "Hierarchical attention module-based hotspot detection in wafer fabrication using convolutional neural network model," IEEE Access, Vol. 12, pp. 92840-92855, 2024.